High-Temperature Thermal Mass Flow Controllers & Meters

GF120xHT high-temperature mass flow controllers (MFCs) and meters are designed to control and measure the mass flow rate of vapor from liquid or solid sources to support the growing usage of these precursors in semiconductor manufacturing processes. The flow module on GF120xHT can withstand operating environments of up to 150°C. To support this temperature range, the…

Accurate Data for Mass-balance Calculations in Pilot Plants

A pilot plant in the chemical/petrochemical industry is a small-scale simulation of manufacturing operations where results determine the most suitable process and the best equipment for scale up. A pilot plant reduces the technical and commercial risk associated with large process plants by providing valuable preliminary scientific data about reactions, material properties, process yields and more….

On-Site Field Calibration

Removing instruments from your process can often be difficult and impractical. Instead, let our technicians come to your facility and calibrate or service your Brooks Instrument flow devices on-site at a time that’s convenient for you. Read more

Widest temperature, pressure and process range. One proven flow meter

Engineered to work where you need it: Choose the MT3809 variable area (VA) flowmeter for all the high-pressure, high-temperature VA flow measurement and control requirements on your next project. Proven to deliver reliable, repeatable gas and liquid flow measurement and control in thousands…