Brooks Instrument

/Brooks Instrument
Einsteinstraat 53 T: +31 (0)318 549 300
3902 HN, Veenendaal F: 
The Netherlands Email - Web

Brooks Instrument B.V.

Brooks Instrument is a company of highly trained specialists with 70 years of experience in development and manufacturing of flow meters.

We are the global leader in precision fluid measurement and control technology and enable precision process performance. We deliver results that consistently create a competitive advantage for our customers. In heavy industry. In oil and gas refining. Chemical and petrochemical research. Pharmaceutical and biopharmaceutical production. Solar cell, LED, thin film, fiber optic and semiconductor manufacturing.

Brooks Instrument has manufacturing locations, sales and service offices in the Americas, Europe, Middle East and Asia. Global Headquarters is based in Pennsylvania – USA.

Brooks Instrument provides a global service network via representatives and distributors.

Product Portfolio

Brooks Instrument’s portfolio includes Metal Tube Variable Area (VA) flow meters, Glass Tube Variable Area (A) flow meters, Thermal Mass Flow controllers and meters, Coriolis Mass Flow controllers and meters, Pressure controllers and regulators, Vacuum Capacitance Manometers and a variety of flow accessories.


Brooks Instrument is a division of ITW (Illinois Tool Works), a Fortune 200 company. ITW is one of the world’s leading diversified manufacturers of specialized industrial equipment, consumables and related service businesses.
The company has prospered for over 100 years because each of ITW’s businesses has an independent entrepreneurial spirit and freedom to innovate. It’s the highly talented people at ITW all over the world who drive our success through new products and customer-driven solutions.

For more information on flow solutions, products, or sales contacts please visit

Complete Waste Gas Combustion Requires Accurate Combustion Gas Flow Measurement

juni 12, 2020

Metal tube variable area flowmeters are robust, reliable and proven to deliver repeatable gas and liquid flow measurement in challenging environments. That’s why they are commonly used in the petroleum industry to measure and control combustion gas flow in flare stacks. Here is a little background on the application. Read more

FOUNDATION™ Fieldbus Transmitter Enables Easier Integration with Control Systems

juni 4, 2020

Since making available the option to specify a FOUNDATION™ Fieldbus transmitter with our popular MT3809 metal tube variable area flow meter, customers have recognized that this makes it easier to integrate the meter with their automation control systems across the plant enterprise. Read more and watch the video

Brooks Instrument Digital Mass Flow Controllers with EtherNet/IP or PROFINET Protocols Feature Web-based Interface

maart 27, 2020

How do you simplify set up and configuration of your digital mass flow controllers while also improving process control? Read more and watch the video

Control up to 30 Mass Flow Meters at Once

februari 8, 2020

Question: What happens when you have more than four devices that you need to power and control?

Answer: The 0260 Series Power Supply, Smart Interface & Controller.

Semiconductor Products

januari 3, 2020

Precise and repeatable process control: It is the fundamental driving factor when manufacturing electronics and semiconductor products. As each successive generation of tools, processes and nodes have been developed and deployed, the extreme, ultra-high performance requirements and demand for constant innovation and improvements in semiconductor flow and pressure instrumentation has – and continues to be – non-stop. Read more

Brooks Instrument Thermal Mass Flow – Theory of Operation

november 7, 2019

Servicing the Brooks Instrument GT1600: Part 2 – Scale Adjustment

augustus 30, 2019

The GT1600’s Scale Adjustment feature is the latest innovation in the Variable Area Rotameter product line to offer a creative solution for our customers. The GT1600 allows its scale to be adjusted upwards or downwards to fine tune the measurement and accommodate for any process variation in the field.

Servicing the Brooks Instrument GT1600: Tube Float Adjustment, Part 1 of 2

augustus 23, 2019

It is sometimes necessary to change the tube and float of a rotameter in the field to accommodate a change in the application. The GT1600’s new design makes it easier than ever to replace the tube or float in the field. The service can be completed with a wrench and a pen; specialized tools are not necessary. Watch how the GT1600 can minimize maintenance time for you!

How can a Mass Flow Controller with a “Zero” Leak by Control Valve Help my Process?

augustus 19, 2019

The typical bioreactor is a vessel where a batch process is used to grow micro-organisms (ex. yeast, bacteria, mammalian cells, etc). The vessel is seeded with a live cell culture and fed with a nutrient (ex. glucose, glycerol/methanol) plus trace minerals. The type of cells employed might be simple prokaryotes (bacteria) or the more complex eukaryotes (yeast, plant, mammalian, etc.). The latter can be extremely ‘finicky’ in their needs for a stable growth environment, but, they can perform biochemical feats that simpler cells cannot (e.g. ‘post-processes’ such as glycolation – attachment of sugar-chains to proteins). The final product might be proteins such as insulin, monoclonal-antibodies, growth-hormone, antibiotics or vaccines. Read more

What Do We Mean by “Usable Range” of a Mass Flow Controller?

juni 19, 2019

What is the “usable” range of a mass flow controller? Is usable range the same as turndown ratio? Before we answer these questions, lets make sure we’re all grounded on the basics, like what is a mass flow controller (MFC) and where are they used. Read more

Commissioning a Brooks Instrument SLA5800 EtherNet/IP™-enabled MFC Using Rockwell Studio 5000

juni 4, 2019

Your EtherNet/IP™ is now connected and added to the network. Review our prior post to bring yourself up to speed, which can be viewed here.

This final step will focus on testing device communications and controls. Navigate to the LOGIC menu within the Rockwell Studio 5000 and select Monitor Tags. This will take you to a listing of devices on the network and allow you to select IO signals to monitor for each device. A quick way to validate IO communications with a device is by using a Watch window to control and monitor your device (for example, issue setpoint commands and observe the resulting flow signal). Read more

Pre-calibrated Gas Pages: Standard with the Brooks Biotech Package

juni 1, 2019

Thermal mass flow controllers are traditionally calibrated for a specific gas – typically a surrogate such as Nitrogen (N2) –  a desired flow range, and a set of operating conditions. Over time, the use of conversion factors based on a ratio of specific heats between the surrogate and the desired gas came into use as a way for users to configure a single mass flow controller for multiple gases. This method for configuring multiple gases is at the heart of the Brooks Biotech Option’s Performance package. Read more

Commissioning a Brooks SLA EtherNet/IP MFC using Rockwell Studio5000: Adding a Device to the Network

april 27, 2019

In our second of three videos on commissioning an EtherNet/IP enabled SLA5800 device, learn how to add a device to the network using Rockwell Studio5000.

5 Reasons to Consider EtherNet/IP™ for Your BioProcess

maart 20, 2019

EtherNet/IP™ is one of the fastest growing digital communication protocols in industrial automation, continuing to gain wider acceptance as companies look to transition from fieldbus to ethernet networks. It represents the largest number of new nodes of industrial ethernet networks shipped, at approximately 25% share of the total marketRead more

Brooks Instrument GT1600 Glass Tube Rotameter

februari 9, 2019

SLA5800 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

januari 12, 2019

Now available with EtherNet/IP™

The SLA5800 Series features the high accuracy, high zero stability and high repeatability you expect from the industry leader in mass flow measurement and control technology. Engineered with advanced, configurable multi-gas/multi-range capabilities, they offer a better zero drift specification compared to competitive products and have been proven to maintain factory calibration and accuracy longer. Article

Recent changes to the International Standard for the Kilogram: Does It Impact my Mass Flow Instrumentation?

december 19, 2018

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Last month, scientists from 60 countries convened in Versailles, France to change the definition of the kilogram (Kg). Instead of basing the kilogram on a physical piece of material – as has been the case for over a century – the kilogram is now based on a universal constant. While the new kilogram standard will impact industries involved in measuring very small or very large masses, it’s impact on flow measurement and instrumentation will be minimal. Read more

Generating Nitrogen Equivalent Data for Your Process Gas

december 14, 2018

If you have a MultiFlo™ enabled device, such as the Brooks Instrument GF100 SeriesGF40 SeriesGF80 Series and Celerity/Unit brand mass flow controllers, you may need to test the device’s accuracy from time to time. No matter what process gas your device is running, thanks to the MultiFlo™ Configurator, you can confirm that the device is calibrated properly by using Nitrogen (N2) – one of the most commonly measured gases available. Lees verder

Brooks Instrument MultiFlo™ Configurator: Creating a Nitrogen (N2) Equivalent Flow Table

november 10, 2018

This video will teach you how to generate a Nitrogen (N2) equivalent flow table and conversion factors from a configured process gas page for the Brooks Instrument GF Series Mass Flow Controllers.

Boosting Bioreactor Performance by Enhancing MFC Accuracy

september 26, 2018

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Today’s biopharmaceuticals are revolutionizing healthcare. Drugs used to treat complex cancers or chronic conditions such as rheumatoid arthritis are offering new hope for decades-old problems. Read more

How the Diagnostic Capabilities of the GF100 MFCs with EtherCAT® Can Improve your Semiconductor Gas Delivery System

augustus 29, 2018

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The intelligent operation and advanced automation that defines today’s semiconductor market enables smarter decision making and provides more opportunities to enhance existing processes. The increased use of automation extends to the tools used in the semiconductor process, where communication between systems is key. Read more

Flow & Pressure Instrumentation for Biopharmaceuticals & Life Sciences

juni 26, 2018

Producing biopharmaceuticals is one of the world’s most demanding manufacturing processes.

Brooks Instrument’s mass flow and pressure control technology helps maximize cell culture yields and control bioprocess costs. Their flow and pressure controllers set global standards for reliability, repeatability and long-term stability. Read more [source:]

Drug Delivery System Enhanced with Accurate Measurement & Control of Supercritical CO2Using Coriolis Mass Flow Meters

mei 4, 2018

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Hot Melt Extrusion (HME) is a process originally developed for the plastic industry that has been adapted for use to prepare several types of dosage forms and drug delivery systems for pharmaceuticals. A key element of this process is to inject carbon dioxide (CO2) directly into the extrusion barrel.

Using Advanced MFC Alarms to Diagnose and Solve Bioprocessing Issues

april 4, 2018

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Losing even a single batch from one of your bioreactors not only impacts your business—it can delay delivery of vital biologics people count on every day.

The best digital mass flow controllers (MFCs) feature alarms and diagnostic tools to give you more complete insight into the quality and efficiency of your biopharma processes.

Brooks Instrument Adds FOUNDATION™ Fieldbus Transmitter to Its MT3809 Series Variable Area Flow Meters

maart 20, 2018

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Brooks Instrument, a world leader in precision fluid measurement and control technology, has added a new FOUNDATION™ Fieldbus transmitter to its popular MT3809 variable area (VA) flow meter, making it easier for users to integrate the unit into their automation control systems for more efficient data capture and digital communication across the plant enterprise.

Connecting your MT3809 Variable Area Flowmeter with FOUNDATION™ Fieldbus to the Network

maart 13, 2018

VDM300 DI Water Vapor Delivery Module

februari 21, 2018

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The Vapor Delivery Module (VDM) from Brooks Instrument is a high-performance, self-contained module for the highly accurate delivery of ultra-high purity deionized (DI) water vapor. It features a power efficient design that enables low temperature, ultra-high purity vapor generation. It utilizes a proven vapor delivery technique and combines it with advanced digital control and integrated diagnostic features in a small, convenient package.

Solve Compliance, Integration & Process Challenges Using Rich Data from Your Instrumentation

februari 15, 2018

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As biotechnology processes evolve, so too does demand for protocols capable of delivering rich data at high speeds. This new eBook by Brooks Instrument offers clear insight on digital communications devices, such as MFCs, equipped for maximum information density in your process system.

New Mass Flow Controller With Self-Diagnostics

februari 14, 2018

Building on the company’s proven GF Series of MFCs with EtherCAT connectivity for high-speed communications, the newly enhanced GF125 MFC features embedded self-diagnostics that automatically detect sensor drift and valve leak-by to help minimize tool downtime and improve process yield. As a result, the enhanced GF125 can run leak and drift self-diagnostics without interrupting process flow steps or requiring any hardware changes, thereby improving process gas accuracy and wafer production throughput.

New Approach Improves Vapor Delivery for Semiconductor Process Steps

januari 17, 2018

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Plasma etch and photoresist strip processes are crucial points in front-end-of-line (FEOL) semiconductor fabrication steps. These processes can leave behind unwanted polymer residues that are a by-product of aggressive chemistries used in these etch and strip steps. 

Using Brooks Mass Flow Controllers with LabVIEW™

januari 11, 2018

An informative and educational blog specializing in pressure, temperature, level and flow instrumentation, control valves, process analyzers, and all other areas of process measurement. Courtesy of Miller Energy, a New Jersey, New York, and Eastern Pennsylvania process instrumentation value added Rep and Distributor. Read more [Source:]

How ISO/IEC 17025 Accreditation Makes Measurement Uncertainties “Less Uncertain”

december 7, 2017

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Industries such as biotechnology count on accreditation to assure flow control calibration accuracy

Any instrument that measures and controls fluid flow needs to be calibrated—upon initial manufacture and then periodically recalibrated to ensure accurate measurement and control. Calibration of flow measurement and control equipment on high-precision metrology systems is essential for instrumentation manufacturers like Brooks Instrument. In fact, increased regulation in industries like biotechnology manufacturing put even greater demands on instrumentation manufacturers to document their known uncertainties through certifications.

Understand Metrology for MFCs

november 7, 2017

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Mass flow controllers (MFCs) precisely deliver fluids, mainly process gases, into bioreactors and other process systems used in biopharmaceutical production. The reliable, repeatable performance of these devices is affected by several factors — two of which can often be overlooked, by both OEMs and end users.

FAQ: What is the straight run of pipe needed when installing a mass flow controller or variable area flow meter (rotameter)?

oktober 20, 2017

Variable Area Flow Meters (Rotameters):

As an Applications Engineer at Brooks Instrument, I talk to a lot of customers and am frequently asked this question, “What is the straight run of pipe needed when installing a metal or glass variable area flow meter (rotameter)?”

Multiflo™: Changing How You Change MFC Gas & Flow Ranges

augustus 10, 2017

Introducing the Brooks Instrument QuickShip Program

augustus 2, 2017

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Working with our distributor partner Cross Instrumentation, we have stocked several of our most in-demand variable area (VA) flow meters, ready for fast delivery to you. Check out for more information and for online ordering!

Real-Time EtherCAT® Data Acquisition Enables Early Detection of Potential Process Issues – Part 2

juli 8, 2017

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In this two-part blog series, we first explored the architecture and performance characteristics of the EtherCAT® protocol. Now, we will examine how Brooks leverages the real-time data acquisition capabilities of EtherCAT® in the GF100 Series MFCs.

How Real-Time EtherCAT® Data Acquisition Enables Early Detection of Potential Process Issues

juni 21, 2017

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Enhance Operational Performance & Value of GF40, GF100 & SLA Series MFCs

In many advanced manufacturing applications, there is a growing demand for the kind of high-speed, flexible machine communications supplied by Ethernet-based bus architectures.

Real-Time EtherCAT® Data Acquisition Enables Early Detection of Potential Process Issues – Part 1

juni 8, 2017

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In this two-part blog series, we will first explore the architecture and performance characteristics of the EtherCAT® protocol. Then we will examine how Brooks leverages the real-time data acquisition capabilities of EtherCAT® in the GF100 Series MFCs.

Specifying Actual Pressure Conditions for the MFC in a Bioreactor

mei 17, 2017

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Bioreactors come in a variety of shapes and sizes from small glass reactors for research applications to large stainless steel reactors for production. Measuring and controlling dissolved oxygen and pH is a critical part of the biotech process, and specifying the right process conditions when ordering the mass flow controllers is important for optimal process control.

Quick Tips for Writing LabVIEW™ Programs for Brooks® MFCs

mei 12, 2017

In our blog post, Using LabVIEW™ Software to Interface with Brooks Instrument Thermal Mass Flow Controllers, Nigel Glover reviewed the most popular forms of data acquisition and the hardware needed to do that. In this post, I’ll review the software side of things and how to get the mass flow controller connected and communicating with LabVIEW™. Luckily, this video tutorial is a great resource and will show you how to do this in under 30 minutes, including how to send a set point and monitor flow response.

How to Replace Your Existing Model 3623-21 Metal Tube Variable Area Flow Meter

april 25, 2017

For years, the 3620 Series metal tube variable area flow meter was the go-to meter for rugged applications of gas and liquids. As times changed, this meter was discontinued and although a drop-in replacement was not feasible, we did design an option to offer a device with the same fit, form and function of Models 3623-21, sizes 7-13.

How to Get the Best Possible Accuracy for Carbon Dioxide Applications

april 8, 2017

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When buying a mass flow controller, the accuracy specification that is published on the data sheet is important criteria to evaluate. In fact, accuracy is so important that you need to look beyond the published accuracy statement because the published accuracy does not necessarily represent the actual process gas accuracy that will be achieved.

Advancing mass flow technology with multi-range and multi-gas programmability

maart 14, 2017

In the past decade, the availability of mass flow controllers that incorporate multi-range and multi-gas programmability has redefined the flow control industry. This new white paper discusses the impact this new technology has had on how MFCs are engineered into different systems, and the way plants have modified their operations to take full advantage of multi-range and multi-gas programmability.

An Easy, Turnkey Solution to Powering and Controlling Mass Flow Controllers

februari 28, 2017

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When buying a mass flow controller (MFC) or mass flow meter (MFM), the attention is usually on selecting and sizing the correct device for the application while power and control is often a secondary thought. When the question of how to power and control one or more devices arises, my top recommendation is the 0254 Four Channel Power Supply, Readout & Set Point Controller. This adaptable and configurable supply will also work with Brooks Instrument pressure & vacuum products or virtually any product that requires a standard DC power supply and has a voltage or mA I/O signal, including other manufacturers’ devices.

Certifications of Elastomer O-Rings for Mass Flow Controllers Explained

januari 19, 2017

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Mass Flow Controllers (MFCs) are used in many applications that require different certification requirements for materials that could come into contact with anything going into the end product. For gas control in bioreactors, gas is being controlled by MFCs in a gas box, in open frame systems, or mounted on a skid. Process gasses go through the MFC and into the bioreactor to control the cell growth and cannot be contaminated by the materials in the gas supply components.

IP, NEMA: What does it all mean and what’s best for my wash-down application?

januari 5, 2017


We are going to take a look at the IP and NEMA ratings and what they mean. With this information you should be able to decide what minimum level of protection you need for your application.

Let’s start with the basics. What does IP and NEMA stand for? IP stands for ingress protection and NEMA stands for National Electrical Manufacturers Association. Both IP and NEMA are rating systems for equipment that might be exposed to liquids, rain, ice, corrosion and contaminates such as dust.

At the Cusp of Exciting New Technology

december 23, 2016


What do the Corvette and today’s new jet engines have in common (besides both going really fast)?

Answer: They both use carbon fiber materials in their construction to be lighter, more efficient and, of course, faster still.

Why, you might ask, is a flow measurement and control company like Brooks Instrument so interested in these materials?

8 Things to Consider When Specifying Valves with Brooks Instrument Variable Area Flow Meters

november 17, 2016


When specifying Brooks Instrument glass tube variable area (VA) flow meters like GT1000 and metal tube VA flow meters like MT3809, it’s important to understand the options available with valves to ensure the right configuration is ordered. In particular, Engineering, Procurement and Construction (EPC) contractors may not be aware of these options during the specification stage of a project and could inadvertently cause unnecessary delays.

Flow Totalization in Gas Usage Monitoring

november 4, 2016


A common application where accurate flow totalization is required is gas usage monitoring. In this application there is typically a single source of gas being shared by several different users or locations within a facility. To account for usage, or allocate costs properly, the facility needs to monitor the amount of gas consumed by each user.

Using LabVIEW™ Software to Interface with Brooks Instrument Thermal Mass Flow Controllers

september 17, 2016


LabVIEW™, a National Instruments software development tool, is widely used to create software applications that monitor and control a variety of sensors and control devices. It is very common to find a laboratory, university, or a pilot manufacturing plant using one of these applications to interface with mass flow devices. LabVIEW™ software can interface with a Brooks Instrument mass flow device through different forms of data acquisition. The most popular forms of data acquisition used with Brooks Instrument mass flow devices are described below.

Successfully Managing Industrial Chlorinated Processes with Metal Sealed Mass Flow Controllers

augustus 13, 2016

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Chlorine (CL2) is a member of the halogen elements group that is highly reactive and bonds easily with hydrogen to form HCL acid. HCL attacks stainless steel aggressively – literally passivating the surface of the stainless steel, and can render a thermal mass flow controller inoperative in a brief period of time. CL2 is used frequently in many applications from making PVC pipe and treating water to plasma etching a computer chip.

Three Brooks Instrument products recognized in 2016 Control Readers’ Choice Awards

juli 11, 2016

Control readers have great taste: Once again, they recognized the performance, accuracy and reliability of several Brooks products by awarding us top rankings in two categories (and third-place ranking in another) in the 2016 Control Magazine Readers’ Choice Awards.

Understanding Mass Flow Controller (MFC) Accuracy

juni 16, 2016

One of the key factors typically considered when selecting a measurement device, such as a mass flow controller (MFC), is accuracy. Anyone who has researched Mass Flow Controller accuracy likely knows that there is a wide variety – both in how accuracy is stated and the device performance.

Sparging with Mass Flow Controllers Makes Wine Taste Better

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Merriam Webster defines sparging as: to agitate (a liquid) by means of compressed air or gas entering through a pipe. A simpler explanation is: sparging is the injection of a gas into a liquid. The method used to expose the gas to the liquid varies and these systems are called aerators, bubblers, carbonators, diffusors or injectors. The most recognizable example is the bubbler in a fish tank.

Is your MFC displaying/outputting a flow signal (or negative flow) with no gas going through the device?

april 21, 2016

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There are many reasons why this can occur, such as a change in mounting orientation, ambient temperature, or process pressure. While mass flow controllers (MFCs) from Brooks Instrument are known for stability and minimal long-term drift, the flow signal or process variable (PV) from an MFC may drift over time.

Understanding Mean Time Between Failure (MTBF) for Process Instrumentation

november 4, 2015

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Mean Time Between Failure (MTBF) is a measure of the reliability of a hardware product, component or system. MTBF is largely based on assumptions and the definition of failure and attention to these details is important for proper interpretation. For complex, repairable systems, failures are considered to be those conditions which place the device or system out of service and into a state for repair.

Safety First – Process Instrumentation Material Considerations

september 29, 2015


When specifying flow, pressure, temperature or other wetted process control instrumentation there is a lot that needs to be considered. Flow rates, pressures, temperatures, I/O signals, material selection, etc. In addition to all of this the specifier needs to be concerned with safety, certifications, approvals, material integrity, weld integrity and of course quality. I am writing this to make you aware of an element of the material integrity that should be considered when selecting a device and/or instrumentation supplier – hydrogen embrittlement.

Flow Control and Measurement Tools for Lab Scientists

april 13, 2015


Brooks Instrument will be showcasing several products to help R&D and analytical lab scientists improve their productivity, such as the GF40/80 Series thermal mass flow controllers (MFCs) and flow meters; the newly enhanced SLA Series of smart MFCs; the Sho-Rate™ family of glass tube flow meters;pressure gauges; and a complete offering of reliable, accurate and cost-effective standard and custom acrylic flow meters.

Brooks Instrument expands line of thermal MFC’s with new GF81 for high-flow process gas applications

juni 27, 2013

Brooks Instrument has expanded its GF 40/80 Series portfolio of thermal mass flow controllers (MFCs) to enable a broader range of applications. The new GF81 MFC can be used for gas flow rates up to 300 slpm, making it ideal for high-flow applications in thin film, solar, analytical, biotech and fuel cell.

Brooks Instrument expands product portfolio and strategic focus for semiconductor processing applications

juni 14, 2013

Brooks Instrument has expanded its commitment to the semiconductor industry with the introduction of four products and a new technology development center in Irvine, Calif. The new products include the GF135 advanced diagnostic mass flow controller (MFC) and three MFCs for high-flow applications. These MFCs, which expand Brooks’ GF100 Series product line for semiconductor processing applications, are all built on a common platform and interface, enabling an entire system to use one product platform.